Spin Coater LSM-200

The instruments of the SAWATEC-Spin Module-line are easy to operate and to handle. The instruments of this line are available as Cabinet or Bench-Mounted-version. They are designed to dry or coat wafers up to 6” or substrates up to 5” x 5” (127 x 127mm). The process-chamber works up to Ø 176mm.

The Spin Module of SAWATEC AG will convince you of high uniformity and repeatability combined with easy handling.

For pilot projects, institutes and R&D.

More information about LSM-200

Spin Coater LSM-600

The instruments of the SAWATEC-Spin Module-line are easy to operate and to handle. The LSM-600 is available as Cabinet-version. It is designed to coat substrates up to 15” x 16” . The process-chamber works up to Ø 600mm.

The Spin Module of SAWATEC AG will convince you of high uniformity and repeatability combined with easy handling.

For pilot projects, institutes and R&D.

More information about LSM-600