LRD-250

The instruments of the SAWATEC-LRD-line are easy to operate and to handle. The instruments of this line are available as Cabinet or Bench-Mounted-version. They are designed to clean, to develop and to etch wafers up to 8” or substrates up to 6” x 6” (150 x 150mm). The process-chamber works up to Ø 212mm.

The Developer-Modules of SAWATEC AG will convince you of process performance and repeatability combined with easy handling.

For pilot projects, institutes and R&D.

More information about LRD-250

More Information about LRD-250-BM