Dry Spin Module TSM-180

The instruments of the SAWATEC-Spin Module-line are easy to operate and to handle. The instruments of this line are available as Bench-Top or Bench-Mounted-version. They are designed to dry or coat wafers up to 6” or substrates up to 5” x 5” (127 x 127mm). The process-chamber works up to Ø 176mm.

The Spin Module of SAWATEC AG will convince you of high uniformity and repeatability combined with easy handling.

For pilot projects, institutes and R&D.

More information about TSM-180-BT

More information about TSM-180-BM