Spin Module SM-180

 

 

The instruments of the SAWATEC-Spin Module-line are easy to operate and to handle. The instruments of this line are available as Bench-Top or Bench-Mounted-version. They are designed to dry or coat wafers up to 6” or substrates up to 5” x 5” (127 x 127mm). The process-chamber works up to Ø 176mm.

The Spin Module of SAWATEC AG will convince you of high uniformity and repeatability combined with easy handling.

For pilot projects, institutes and R&D.

More information about SM-180-BT

More information about SM-180-BM

 

 

Spin Coater LSM-200

 

 

The instruments of the SAWATEC-Spin Module-line are easy to operate and to handle. The instruments of this line are available as Cabinet or Bench-Mounted-version. They are designed to dry or coat wafers up to 6” or substrates up to 5” x 5” (127 x 127mm). The process-chamber works up to Ø 176mm.

The Spin Module of SAWATEC AG will convince you of high uniformity and repeatability combined with easy handling.

For pilot projects, institutes and R&D.

More information about LSM-200

More information about LSM-200-BM

 

 

Spin Coater LSM-250

 

 

The instruments of the SAWATEC-Spin Module-line are easy to operate and to handle. The instruments of this line are available as Cabinet or Bench-Mounted-version. They are designed to dry or coat wafers up to 8” or substrates up to 6” x 6” (150 x 150mm). The process-chamber works up to Ø 215mm.

The Spin Module of SAWATEC AG will convince you of high uniformity and repeatability combined with easy handling.

For pilot projects, institutes and R&D.

More information about LSM-250

More information about LSM-250-BM

 

 

Spin Coater LSM-300

 

 

The instruments of the SAWATEC-Spin Module-line are easy to operate and to handle. The instruments of this line are available as Cabinet or Bench-Mounted-version. They are designed to dry or coat wafers up to 12” or substrates up to 8” x 8” (200 x 200 mm). The process-chamber works up to Ø 300mm.

The Spin Module of SAWATEC AG will convince you of high uniformity and repeatability combined with easy handling.

For pilot projects, institutes and R&D.

More information about LSM-300

More information about LSM-300-BM

 

 

Spin Coater LSM-600

 

    

 

The instruments of the SAWATEC-Spin Module-line are easy to operate and to handle. The LSM-600 is available as Cabinet-version. It is designed to coat substrates up to 15” x 16” . The process-chamber works up to Ø 600mm.

The Spin Module of SAWATEC AG will convince you of high uniformity and repeatability combined with easy handling.

For pilot projects, institutes and R&D.

More information about LSM-600