Dry Spin Module TSM-180

The instruments of the SAWATEC-Spin Module-line are easy to operate and to handle. The instruments of this line are available as Bench-Top or Bench-Mounted-version. They are designed to dry or coat wafers up to 6” or substrates up to 5” x 5” (127 x 127mm). The process-chamber works up to Ø 176mm.

The Spin Module of SAWATEC AG will convince you of high uniformity and repeatability combined with easy handling.

For pilot projects, institutes and R&D.

More information about TSM-180-BT

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Spin and Rins Dryer RD-150

The SAWATEC-Spin and Rins Dryer RD-150 is easy to operate and to handle. The instrument is available as Cabinet or integrated part of systems of wet-chemistry. Wafers / substrates can be rinsed by a cooling and drying centrifuge according to processes of wet chemistry. And they can be dryed by centrifugal force an heated nitrogen.

The Spin and Rins Dryer of SAWATEC AG will convince you of high uniformity and durability combined with easy handling.

For pilot projects, institutes and R&D.

More information about RD-150