SAWATEC-Cluster-System-4

The SCS-4 is a fully programmable cassette-to cassette system. It can be equipped with the modules as coater, cleaner, developper, HMDS-hotplates, hotplates and coolplates for wafer sizes up to 8’’ and substrates up to 6’’ x 6’’. The SCS-4 is equipped with a central positioned 3-axis field approved high speed robot.

By interest please directly contact our dealers or the SAWATEC-sales-department ( ).